Protocols: GEM,SECS-I,SECS
- II, HSMS-SS
Carrier Management Systems
Real Time Control Software
Man Machine Interfaces
Scheduling Algorithms
Recipe Management Systems
Process Simulators with TCL scripting |
Development of Real time
Control Software including Man Machine Interface
(MMI) for Automated Cassette to Cassette
Wafer Plating Machines with higher yield.
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Development of a simulator for wafer processing
equipment : generic across product lines,
easy to use, Scalable, configurable and
extensible (FAB production equipment)
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here for more |
